Air Pollution Control Process
TSMC reached an average reduction rate of 95% in organic waste gas emissions for five consecutive years since 2015, higher than the 90% required by law, as a result of the highly efficient waste gas treatment systems that target different process waste gases. The average reduction rate of volatile organic gases was also up to 97.8%.
TSMC Assessment of Best Available Technology
In order to improve the capabilities of air pollution prevention facilities, TSMC continuously strives to develop reduction technology, evaluates feasibility from factors such as fab space, technical safety, and economic interests, and considers the reduction effectiveness of prevention technology to make multi- faceted, comprehensive assessments of whether to introduce such prevention technology.
||The size of circles represents the importance of the prevention technology. Higher emissions of pollutants have higher importance
TSMC's air pollution control complies with local regulatory standards of Taiwan and overseas subsidiaries. All equipment is provided with at least one set of backup system. TSMC has also established automatic monitoring systems to grasp the effectiveness of the exhaust gas treatment at all times.
For more information, please read TSMC 2019 Corporate Responsibility Report:
Green Manufacturing - Air Pollution Control
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