TSMC comprehensively analyzes distribution of tool energy consumption, builds energy baseline and achieves objectives of energy performance improvement.
TSMC actively implements the plan of energy management. In 2019, all 12 TSMC fabs in Taiwan have achieved ISO 50001 certification by third party.

Driving Energy Management, All TSMC Fabs Have Achieved ISO 50001 Certification

Fulfilling the Commitment to Environmental Sustainability by Adopting International Standards
C.C. Hu
F.Y. Lee
S.D. Yang
Deacon Chang

With its corporate social responsibility vision to "strengthen environmental protection", TSMC is making continuous efforts to seek the most efficient use of energy and resources. In 2019, TSMC introduced ISO 50001 Energy Management System (EnMS) to all its 12 TSMC Fabs in Taiwan. All of the Fabs have received ISO 50001 certification after the official third-party testing and qualification and systematic energy inspections, energy consumption analysis, energy-saving actions, periodic inspection and improvement to enhance energy efficiency. In 2020, TSMC will introduce ISO 50001 Standards to its to further implement its corporate social responsibility of environmental sustainability.

Timeline of Energy Management System's introduction at TSMC

Align with International Standards by Introducing ISO 50001 Energy Management System

TSMC actively follows government's policy of energy and carbon reduction, and promotes various energy-saving plans through its Energy and Carbon Reduction Committee, including machine energy saving workshop, AI powered chilled water energy saving system and so on. In 2019, TSMC has saved 300GWh of energy, collected the practical experience from all the Fabs, implemented integration across different Fab, and accelerated the introduction of ISO 50001 Energy Management System.

Practice Green Management across Organizations

Organization
  • Energy and Carbon Reduction Committee
  • Facility Division
  • All wafer Fabs and advanced backend Fabs
Task
  • Regularly review the efficiency of energy use
  • Set up energy-saving objectives
  • Lead relevant divisions to implement actions
  • Inspect energy and analyze distribution of machine energy consumption
  • Create the tactic plan for energy saving and carbon reduction and execute it
  • Supervise, measure and analyze action items

Meet the Goal for Energy Performance Improvement through PDCA Cycle

ISO 500001 energy management system developed by International Organization for Standardization (ISO) is an industrial energy management structure based on a practical standard. TSMC has implemented ISO 50001 energy management system in all its Fabs based on a Plan-Do-Check-Act (PDCA) cycle. The Company began with energy inspections, built energy baseline to analyze energy consumption, created the tactic plan for energy saving and carbon reduction and drove its implementation among all the Fabs. TSMC also reviewed, measured and analyzed changes in energy performance indicators regularly to make improvement timely. In September 2019, twelve of TSMC Fabs in Taiwan had all passed third-party certification of Societe Generale de Surveillance S.A (SGS) and Det Norske Veritas (DNV) to fulfill its commitment to sustainable management.

Key Objectives of PDCA for Energy Management System

Energy-Saving Performance

Note: Carbon equivalent coefficient factor= 0.533 kg/ kWh